Bayesian approach for determining the optical constants of layered systems using EUV reflectometry: The effect of different priors |
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| O. Henze, V. Soltwisch, A. Tiwari, I. A. Makhotkin, N. Hegemann, S. Heidenreich |
- Abstract:
For the development of novel technologies and high-precision manufacturing techniques in semiconductor and optics industries and in nanotechnologies, precise knowledge of the optical properties of these materials is vital, providing the foundation e.g. for novel nanoelectronic devices, high-quality sensors or effective photovoltaic elements.
- Keywords:
- semiconductor, optics industries, nanotechnologies, optical properties of materials, novel nanoelectronic devices, effective photovoltaic elements
- Download:
- IMEKO-TC10-2023-019.pdf
- DOI:
- 10.21014/tc10-2023.019
- Event details
- IMEKO TC:
- TC10
- Event name:
- TC10 Conference 2023
- Title:
19th IMEKO TC10 Conference "Measurement for Diagnostics, Optimisation and Control to Support Sustainability and Resilience"
- Place:
- Delft, The NETHERLANDS
- Time:
- 21 September 2023 - 22 September 2023