ABSOLUTE CALIBRATION OF A FIZEAU INTERFEROMETER WITH A LIQUID PLANE

G. Ruiz, A. Gamboa, B. Valera, R. Nava
Abstract:
The calibration process of a Fizeau interferometer using a liquid reference plane in an accredited secondary laboratory is presented. Influence factors involved, mainly vibration effects, are considered. The interferograms obtained, are then processed by two means: with self- developed software, based on mathematical morphology theory; and with free available web software. For validation, the results of measurement are compared with two previous calibrations made with commercial interferometers. An uncertainty of 26 nm is associated to the calibration process.
Keywords:
absolute calibration, liquid plane, Fizeau interferometer, traceability
Download:
PWC-2006-TC8-017u.pdf
DOI:
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Event details
Event name:
XVIII IMEKO World Congress
Title:

Metrology for a Sustainable Development

Place:
Rio de Janeiro, BRAZIL
Time:
17 September 2006 - 22 September 2006