THREE MOIRÉ TECHNIQUES UNDER A LASER SCANNING MICROSCOPE FOR MICRON/SUBMICRON-SCALE DEFORMATION MEASUREMENT
Qinghua Wang, Hiroshi Tsuda, Satoshi Kishimoto, Yoshihisa Tanaka, Yutaka Kagawa
Abstract:
Three Moiré techniques based on a laser scanning microscope (LSM) were presented and compared for the first time, including the LSM scanning moiré method, our developed LSM overlapping moiré method, and our newly developed LSM secondary moiré method. The formation principles of these moiré patterns and the measurement principles for deformation measurement were introduced. The applicable conditions of these three techniques were analyzed. Some typical moiré fringes on a strain gauge, carbon fiber reinforce plastics, a polyimide film and a silicon wafer were illustrated. Our developed LSM overlapping moiré method and secondary moiré method are effective in eliminating the scanning distortion of the LSM. These three kinds of moiré techniques are able to expand the application range of the LSM in deformation measurement at the micron and the submicron scales.
Keywords:
laser scanning microscope, Moiré, overlapping, secondary, deformation
Download:
IMEKO-TC14-2014-71.pdf
DOI:
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Event details
IMEKO TC:
TC14
Event name:
TC14 LMPMI Symposium 2014
Title:

11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry

Place:
Tsukuba, JAPAN
Time:
03 September 2014 - 05 September 2014
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