A NEW APPROACH TO IN-SITU FORMTEST-INTERFEROMETRY |
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| D. Doerner, A. Bai, P. Mangalasseril, T. Pfeifer |
- Abstract:
- Interferometry is a common method for testing the form of ultra-precise components. However interferometrical measurements are very sensitive to external influences. Due to this reason, in-situ measurements are very difficult to perform, especially in the vicinity of production processes. In this paper we present a new concept for the integration of interferometers in a machine tool and first results of the analysis of fundamental influences on interferometers operated in-situ.
- Keywords:
- interferometry, in-situ measurement, simulation
- Download:
- PWC-2003-TC2-017.pdf
- DOI:
- -
- Event details
- Event name:
- XVII IMEKO World Congress
- Title:
Metrology in the 3rd Millennium
- Place:
- Dubrovnik, CROATIA
- Time:
- 22 June 2003 - 28 June 2003