DISPLACEMENT MEASURING SENSOR CALIBRATION USING NONLINEARITY FREE LASER INTERFEROMETER
TaeBong Eom, JaeWan Kim
Abstract:
For calibration of displacement measuring sensors with sub-nanometer resolution, a novel calibration system using laser interferometer was developed. It is directly traceably to the Meter and portable due to use of laser coupled by an optical fiber. And also it has a higher accuracy because of nonlinearity free laser interferometer and compact design. The detailed system and one example of calibration are described. Finally a detailed uncertainty budget is described.
Keywords:
nanosensor, nonlinearity, laser interferometer
Download:
PWC-2003-TC14-028.pdf
DOI:
-
Event details
Event name:
XVII IMEKO World Congress
Title:

Metrology in the 3rd Millennium

Place:
Dubrovnik, CROATIA
Time:
22 June 2003 - 28 June 2003
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