CONSIDERATIONS ON NANOHARDNESS MEASUREMENT |
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| Z. Rymuza, M. Misiak, J. T. Wyrobek |
- Abstract:
- Measurement of hardness on nano-scale is discussed. Methods and instruments used are described and energy definition of hardness is introduced. Results of nanohardness measurements of materials, in particular ultrathin films,used in Micro Electro Mechanical Systems (MEMS) technology are presented.
- Keywords:
- hardness, nanohardness measurement, MEMS materials
- Download:
- IMEKO-WC-2000-TC5-P171.pdf
- DOI:
- -
- Event details
- Event name:
- XVI IMEKO World Congress
- Title:
Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future
- Place:
- Vienna, AUSTRIA
- Time:
- 25 September 2000 - 28 September 2000