DEVELOPMENT OF CALIBRATION METHODS FOR THE NANOINDENTATION TEST
K. Herrmann, K. Hasche, F. Pohlenz, R. Seemann
Abstract:
The nanoindentation method increasingly gains in importance for the determination of the mechanical properties of thin layers. Comparisons carried out in the field of the nanoindentation method reveal, however, significant deficits in calibration. The paper presents investigation results for the calibration of the essential quantities influencing the uncertainty of measurement. They chiefly comprise the geometrical deviations of the indenter, the depth and the force measuring system, the measuring deviation of zero point of the depth measurement and the compliance of the measuring device.
Keywords:
nanoindentation, calibration, hardness
Download:
IMEKO-WC-2000-TC5-P169.pdf
DOI:
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Event details
Event name:
XVI IMEKO World Congress
Title:

Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future

Place:
Vienna, AUSTRIA
Time:
25 September 2000 - 28 September 2000
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