MICROLASER DISPLACEMENTMETER |
|---|
| S. Sakano |
- Abstract:
- An extremely small optical displacement sensor using a laser diode integrated with a microlens and based on the composite cavity principle was constructed. The microlaser displacementmeter has been developed using this optical sensor. The measuring resolution of the displacement is less than 0.01 µm and it can detect very low velocities of less than 5 µm/s. The optical sensor is very small, 800 µm × 900 µm. The microlaser displacementmeter shows good linearity between relative displacement and output signal.
- Keywords:
- optical micro system, microlaser, displacementmeter
- Download:
- IMEKO-WC-2000-TC2-P052.pdf
- DOI:
- -
- Event details
- Event name:
- XVI IMEKO World Congress
- Title:
Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future
- Place:
- Vienna, AUSTRIA
- Time:
- 25 September 2000 - 28 September 2000