PECULIARITIES OF CYLINDER DIAMETER DETERMINATION BY DIFFRACTION METHOD
Y. V. Chugui, A. A. Pavlov
Abstract:
The detailed analysis of diffraction pattern in far zone for circular absolutely reflecting metal cylinder with regard to the influence of wave reflected from its surface is presented. The method of stationary phase was used when calculating the reflected component of the input field. The behaviour of diffraction pattern minima for wide range of angles is studied. The formula for angular position of minima in case of small observation angles was found. Three algorithms of cylinder diameter reconstruction using its diffraction pattern were proposed. They allow theoretically to increase appreciably the accuracy of the dimensional measurements.
Keywords:
Fraunhofer diffraction, cylinder, optical inspection, laser metrology
Download:
IMEKO-WC-2000-TC2-P033.pdf
DOI:
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Event details
Event name:
XVI IMEKO World Congress
Title:

Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future

Place:
Vienna, AUSTRIA
Time:
25 September 2000 - 28 September 2000
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