THERMOPOWER MEASUREMENT OF SINGLE NANOWIRE USING A MEMS DEVICE

Ho Sun Shin,Joon Sung Lee,Seong Gi Jeon,Jin Yu, Jae Yong Song
Abstract:
We have fabricated a MEMS device on suspended silicon nitride in order to measure the thermoelectric properties of single nanowire. The temperature gradient was generated by a nanoheater and the temperatures of thermometers were calibrated and measured. Seebeck coefficient and electrical conductivity of single Bi2Te3 nanowire with a 70 nm-diameter were measured in the temperature range of 50 K to 400 K. Based on the simulation results of the temperature distribution over the MEMS structure, the method of calibrating the temperature and measurement uncertainty are discussed.
Keywords:
nanowire, MEMS, thermal simulation, thermopower
Download:
IMEKO-WC-2012-SS2-O8.pdf
DOI:
-
Event details
Event name:
XX IMEKO World Congress
Title:

Metrology for Green Growth

Place:
Busan, REPUBLIC of KOREA
Time:
09 September 2012 - 12 September 2012