ENHANCED MEASUREMENT OF HIGH ASPECT RATIO SURFACES BY APPLIED SENSOR TILTING |
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| A. Schuler, A. Weckenmann, T. Hausotte |
- Abstract:
- During tactile surface measurements the contact point between probing tip and surface varies depending on the local surface angle. To reduce the resulting measurement deviation on high slopes a probing principle is investigated that applies a dynamic surface dependent sensor tilt. This probing process and the logics for the angle determination have been simulative evaluated. A test stand based on a nanometer coordinate measuring machine is developed and fitted with a rotation kinematic based on stacked rotary axes. Systematic positioning deviations of the kinematic are reduced by a compensation field. The test stand has been completed and results are presented.
- Keywords:
- profilometry, servo system, uncertainty, simulation
- Download:
- IMEKO-WC-2012-SS2-O1.pdf
- DOI:
- -
- Event details
- Event name:
- XX IMEKO World Congress
- Title:
Metrology for Green Growth
- Place:
- Busan, REPUBLIC of KOREA
- Time:
- 09 September 2012 - 12 September 2012