STEP RESPONSE OF VACUUM SENSORS – A PRELIMINARY STUDY |
|---|
| Fredrik Arrhén |
- Abstract:
- The development of a system for determining step response of total vacuum gauges is described as well as results for some typical vacuum gauges. The system is mainly suitable for steps from atmospheric pressure down to around 50 Pa. Step response times reached with the system are (with reasonable sizes of DUT internal volumes) about 20 ms.
- Keywords:
- vacuum gauge, dynamic pressure, step response
- Download:
- IMEKO-WC-2012-TC16-O8.pdf
- DOI:
- -
- Event details
- Event name:
- XX IMEKO World Congress
- Title:
Metrology for Green Growth
- Place:
- Busan, REPUBLIC of KOREA
- Time:
- 09 September 2012 - 12 September 2012