COMPARISON OF MILLIGRAM SCALE DEADWEIGHT FORCES TO ELECTROSTATIC FORCES |
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| Sheng-Jui Chen, Sheau-Shi Pan and Yi-Ching Lin |
- Abstract:
- This paper presents a comparison of milligram scale deadweight forces to electrostatic forces that is generated from an electrostatic sensing & actuating force measurement system recently built in Center for Measurement Standards, Industrial Technology Research Institute (CMS/ITRI). In the first section, we briefly introduce the electrostatic sensing and actuating force measurement system, and then we describe the experimental setup for the comparison and the results. Finally, we give a discussion and outlook.
- Keywords:
- deadweight force, electrostatic force, electrostatic actuation, capacitive position sensing, force balance
- Download:
- IMEKO-WC-2012-TC3-O29.pdf
- DOI:
- -
- Event details
- Event name:
- XX IMEKO World Congress
- Title:
Metrology for Green Growth
- Place:
- Busan, REPUBLIC of KOREA
- Time:
- 09 September 2012 - 12 September 2012