NANOPOSITIONING SYSTEM WITH COMBINED FORCE MEASUREMENT BASED ON ELECTROMAGNETIC FORCE COMPENSATED BALANCES |
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| Christian Diethold, Falko Hilbrunner, Thomas Fröhlich, Eberhard Manske |
- Abstract:
- This paper discusses a novel nanopositioning system which is based on an electromagnetic force compensated (EMC) balance. In addition to the positioning the actuating force can also be measured. This enables the measurement of force displacement curves of springs with a wide variety of spring constants. The measurement range of the spring constants is up to 1010 N/m with a maximum resolution of about 0.01 N/m. Compared to other principles for measuring the spring constant the introduced method is more sophisticated. Both force as well as the displacement can be measured traceable and simultaneously.
- Keywords:
- nanopositioning system, force displacement measurement, electromagnetic force compensated balances
- Download:
- IMEKO-WC-2012-TC3-O16.pdf
- DOI:
- -
- Event details
- Event name:
- XX IMEKO World Congress
- Title:
Metrology for Green Growth
- Place:
- Busan, REPUBLIC of KOREA
- Time:
- 09 September 2012 - 12 September 2012