IMPROVEMENT OF MEASUREMENT ACCURACY BY COMBINED EVALUATION OF CMM AND TRACKING INTERFEROMETER MEASUREMENTS
Frank Härtig, Christian Keck, Karin Kniel, Heinrich Schwenke, Franz Wäldele, Klaus Wendt
Abstract:
This paper presents a novel approach to improve the accuracy of coordinate measuring machines (CMM) by integrating a single high precision tracking interferometer (TI) as an additional measurement axis. Improved positions are obtained by a combination of the CMM positions as read from the scales and the distances produced by the TI. Monte-Carlo simulations of length and flatness measurements show that the uncertainties can be reduced considerably by an appropriate configuration. First measurements confirm the results of preliminary simulations.
Keywords:
Co-ordinate measuring machines, Tracking interferometer, Dimensional measurements
Download:
PWC-2003-TC7-029.pdf
DOI:
-
Event details
Event name:
XVII IMEKO World Congress
Title:

Metrology in the 3rd Millennium

Place:
Dubrovnik, CROATIA
Time:
22 June 2003 - 28 June 2003
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