CONTACTLESS DIAGNOSTICS OF THIN FILM LAYERS |
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| Vaclav Papez, Stanislava Papezova |
- Abstract:
- Thin layer resistance measurement using the change of complex coil impedance is a contact-less method for conductive layer diagnostics. The analysed sample is inserted into the leakage field of the coil. Our conclusions of a theoretic analysis have been verified in experimental arrangement with a measuring coil and a vector impedance meter. The layer sheet resistance is evaluated by electronic system. A special algorithm, ensuring the explicit evaluation of the measuring, is used for determination of the layer sheet resistance.
- Keywords:
- thin film diagnostics
- Download:
- IMEKO-WC-2009-TC10-371.pdf
- DOI:
- -
- Event details
- Event name:
- XIX IMEKO World Congress
- Title:
Fundamental and Applied Metrology
- Place:
- Lisbon, PORTUGAL
- Time:
- 06 September 2009 - 11 September 2009