DESIGN, FABRICATION AND ELECTROMECHANICAL CHARACTERISTICS OF A MEMS BASED MICROMIRROR
Talari Rambabu, Mita Dutta
Abstract:
In this paper the design, fabrication and electromechanical characteristics of a electrostatic torsional micromirror is presented. In addition to that the static characteristics of a micro-mirror based on the parallel-plate capacitor model are described.
Keywords:
MEMS, Micro-mirror, Snap-down
Download:
IMEKO-WC-2009-TC3-028.pdf
DOI:
-
Event details
Event name:
XIX IMEKO World Congress
Title:

Fundamental and Applied Metrology

Place:
Lisbon, PORTUGAL
Time:
06 September 2009 - 11 September 2009
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