THERMAL DESORPTION MASS SPECTROMETRY (TDS): APPLICATION ON MASS METROLOGY
Zaccaria Silvestri, Patrick Pinot
Abstract:
A new device has been developed for the study of physisorbed elements on polished and large surface used in mass metrology.
This technique, based on the analysis by mass spectrometry of desorbed molecules caused by heating under vacuum from the analyzed surface, is presented.
The first application of this device is the study of the current and future mass standards to understand the reactivity of their surface depending of the storage conditions, of the cleaning process and polishing method. So, an example of surface contamination analysis by thermal desorption mass spectrometry (about cleaning effect on a super alloy based on cobalt) is given.
Keywords:
mass spectrometry, thermal desorption, cleaning effect, contamination
Download:
IMEKO-WC-2009-TC3-025.pdf
DOI:
-
Event details
Event name:
XIX IMEKO World Congress
Title:

Fundamental and Applied Metrology

Place:
Lisbon, PORTUGAL
Time:
06 September 2009 - 11 September 2009
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