T. Watanabe, H. Fujimoto, K. Nakayama, M. Kajitani, T. Masuda
CALIBRATION OF A POLYGON MIRROR BY THE ROTARY ENCODER CALIBRATION SYSYTEM
In this paper, we propose the new calibration measurement method of a polygon mirror. The measuring method of the conventional polygon mirror that uses an index table needs much technical skill, much time, and the amount of work. We used the Equal-Division- Averaged (EDA) method and have already developed the self-calibration system that calibrates the angle graduation signal of two sets of rotary encoders simultaneously. By combining this system and a polygon mirror, it becomes possible to measure the angle between faces of a polygon mirror. Now, in Japan, the angle traceability system which used the rotary encoder as the base of angle measurement device is established. If this technology is applied and a polygon mirror can be measured, it will make it easy to build a polygon mirror into the same traceability system.